Definitions for "Surface Micromachining"
a MEMS fabrication process, based on standard CMOS microelectronic processes, in which tiny polysilicon parts are photolithographically patterned with surrounding layers of silicon dioxide that can be etching away "releasing" the part
The MEMS fabrication process based on standard CMOS microelectronic processes. MEMS structures are photolithographically patterned in alternating layers of deposited polysilicon and silicon dioxide, and then are "released" by dissolving away the silicon dioxide layers.
An additive fabrication technique which involves the building of a device on the top surface of a supporting substrate. This technique is relatively independent of substrate; therefore, it can be easily mixed with other fabrication techniques which modify the substrate first.