Definitions for "Gettering"
1: a controlled modification of the silicon crystal to draw impurities to the bulk, or to the back surface of the wafer. Contaminants are removed sufficiently far from the front surface, where the devices are built, to render their potential degrading effects negligible. 2: the process that immobilizes impurities at locations away from the region of the specimen to be investigated.
process which moves contaminants and/or defects in a semiconductor away from its top surface into its bulk and traps them there, creating a denuded zone. learn more.
Gettering is a process that attracts contaminents and traps defects when the wafers are heated. Can be initiated through mechanical damage or interstial oxygen. Extrinsic gettering is caused by BSD. Intrinsic gettering is caused by interstial oxygen.