a piece of semiconductor process equipment utilized to perform the coating process. Coaters typically provide an input and output elevator that can hold wafer cassettes, have a shuttle system to transport wafers from the input to the spin head, and transport wafers from the spin head to the output. Coaters may also include hotplates to bake wafers before or after coating and chill plates to return the wafer temperature to room temperature following baking.

A machine designed to apply various liquids to the surface of a moving web of material. Once coated the web passes through a curing/drying sequence.

A machine composed of an unwind stand, coating devices, rollers, ovens and wind-up stand used to apply adhesive to backing and or carriers to produce a pressure-sensitive tape.

The machine that applies the adhesive to tape.